Assessment of Occupational Health Risks for Maintenance Work in
Fabrication Facilities: Brief Review and Recommendations
Dublin Core
Title
Assessment of Occupational Health Risks for Maintenance Work in
Fabrication Facilities: Brief Review and Recommendations
Fabrication Facilities: Brief Review and Recommendations
Subject
Fabrication (FAB) facility
Maintenance work
Occupational health risk assessment
(OHRA)
Semiconductor
Maintenance work
Occupational health risk assessment
(OHRA)
Semiconductor
Description
This study focuses on assessing occupational risk for the health hazards encountered during
maintenance works (MW) in semiconductor fabrication (FAB) facilities.
Objectives: The objectives of this study include: 1) identifying the primary health hazards during MW in
semiconductor FAB facilities; 2) reviewing the methods used in evaluating the likelihood and severity of
health hazards through occupational health risk assessment (OHRA); and 3) suggesting variables for the
categorization of likelihood of exposures to health hazards and the severity of health effects associated
with MW in FAB facilities.
Methods: A literature review was undertaken on OHRA methodology and health hazards resulting from
MW in FAB facilities. Based on this review, approaches for categorizing the exposure to health hazards
and the severity of health effects related to MW were recommended.
Results: Maintenance workers in FAB facilities face exposure to hazards such as debris, machinery
entanglement, and airborne particles laden with various chemical components. The level of engineering
and administrative control measures is suggested to assess the likelihood of simultaneous chemical and
dust exposure. Qualitative key factors for mixed exposure estimation during MW include the presence of
safe operational protocols, the use of air-jet machines, the presence and effectiveness of local exhaust
ventilation system, chamber post-purge and cooling, and proper respirator use. Using the risk (R) and
hazard (H) codes of the Globally Harmonized System alongside carcinogenic, mutagenic, or reprotoxic
classifications aid in categorizing health effect severity for OHRA.
Conclusion: Further research is needed to apply our proposed variables in OHRA for MW in FAB facilities
and subsequently validate the findings.
maintenance works (MW) in semiconductor fabrication (FAB) facilities.
Objectives: The objectives of this study include: 1) identifying the primary health hazards during MW in
semiconductor FAB facilities; 2) reviewing the methods used in evaluating the likelihood and severity of
health hazards through occupational health risk assessment (OHRA); and 3) suggesting variables for the
categorization of likelihood of exposures to health hazards and the severity of health effects associated
with MW in FAB facilities.
Methods: A literature review was undertaken on OHRA methodology and health hazards resulting from
MW in FAB facilities. Based on this review, approaches for categorizing the exposure to health hazards
and the severity of health effects related to MW were recommended.
Results: Maintenance workers in FAB facilities face exposure to hazards such as debris, machinery
entanglement, and airborne particles laden with various chemical components. The level of engineering
and administrative control measures is suggested to assess the likelihood of simultaneous chemical and
dust exposure. Qualitative key factors for mixed exposure estimation during MW include the presence of
safe operational protocols, the use of air-jet machines, the presence and effectiveness of local exhaust
ventilation system, chamber post-purge and cooling, and proper respirator use. Using the risk (R) and
hazard (H) codes of the Globally Harmonized System alongside carcinogenic, mutagenic, or reprotoxic
classifications aid in categorizing health effect severity for OHRA.
Conclusion: Further research is needed to apply our proposed variables in OHRA for MW in FAB facilities
and subsequently validate the findings.
Creator
Dong-Uk Park 1,*, Kyung Ehi Zoh 2,3,#, Eun Kyo Jeong 4
, Dong-Hee Koh 5
, Kyong-Hui Lee 6
,
Naroo Lee 7
, Kwonchul Ha
, Dong-Hee Koh 5
, Kyong-Hui Lee 6
,
Naroo Lee 7
, Kwonchul Ha
Source
https://pdf.sciencedirectassets.com/287282/1-s2.0-S2093791124X00025/1-s2.0-S2093791123000823/main.pdf?X-Amz-Security-Token=IQoJb3JpZ2luX2VjED0aCXVzLWVhc3QtMSJIMEYCIQDEkClwUjRYEAkBFDnI6svgu6nMHvbTTuPh6Sc%2F4FtPWQIhAOj4wvZbNx30ex3Am%2FnHXWO0m%2FOF%2BCbfktpTZ%2BiUfLabKrMFCAYQBRoMMDU5MDAzNTQ2ODY1IgwNxxw06RNUZG4EAd4qkAVP0ZsKW920OHqgksos0eiq76EAt3DUF2EGKzbvQWaiCV6aZORwcliahawK62UM0y1QyL2AOG6VJ%2BS60ZiaXuhqwDWTfni6fqKxVy3wmCFeG9y%2BOgIEkcM0c8R0tA7ry10X0LDFfS960Lq%2Fh8MLIzED08SkUoJzuiy%2FKBvEN7m%2F5VEvnuK7fPRDy43LUfkGC1wx%2FAf23FXXvYjcM5Kn9TdWT5V3PmNQDnYU5sxxka2Qz3xuNcI%2B%2F2ODGBe4713S45LCnufsu1HPO%2FiDkOoF7aA2x6ic6rZ%2FvJWy9zDbnNe4BkamlsRtr1JEwNdThP%2BGbl8aKs%2BpIqJj%2BeX0%2BDEfxgvDo3IlGmsNdD2d2MKl2eBzsc%2BDKCTcMV9kIPkyR%2F%2BRAWkkcjXTMm4WOJsWBrcR5nK5MjpegorAAU2n1mmDYDMLjgQdMRmmBaiFrX5w%2Bmr1MXsX9dKX6PcF9b7VLZrJA2O0xW3o8%2FdFVxNjheF9Uvw5%2FzCx49f0Ajf5u8lw8GTxOnjeMYV%2BaGexRtnBrKKLuDmgoTPL4IAUqGh1gtCU1xlEV8UnPWfuX9gdx%2BqJuJ4tdEDUJHoG5CEI%2FeS%2F5RBlmTlBPyIrelgVLvtoMTA%2BZV7ePGXKGrq35RJCD1qt3K2nf%2Fg0PqiFKhSvJC6Y7nJgD1y69B7bNWXafJVezm4FyoUXQOq9zfuAoXFR6Y5ANaveITkf1TmKzeVoXnaBB7tnyf4lOiihDoCxjecICj%2BnKcTjgHkKg5VZEgWbdA1xG3hR5wrWOqVBqOkay4E38xKlQQ1lHDaThJnmTeKHwaW26obPBTWdDwEtWUd2EthEnve4v1KJ1FgYmYbabAUM8j755bzRjpeZgz6XLQdzf5%2Fv0w357DDf%2B%2FnMBjqwAfjGtHcvDxcPBl9ntPHjF7DLua6D6QKF9kbDShLXKlOQpHGF%2FTpuruakzaiFLsIuLy%2FqaaDLiTgdwdVrrZThcmjokm9JCCIUSie1gO9uuswrc1E2PTIkJxf8syutlTD4eV7lMgUy8pOt5Pil3hkuRo3oCI8mpFv4l024wm0FPVJ0mGoY8%2FPeBkwhPFERiy%2FxMOg6x3PJrg%2BcrRyGnQaxtV0pshHaLNknpw0N3sWRRZsX&X-Amz-Algorithm=AWS4-HMAC-SHA256&X-Amz-Date=20260225T061449Z&X-Amz-SignedHeaders=host&X-Amz-Expires=300&X-Amz-Credential=ASIAQ3PHCVTYZ2HM5Z5X%2F20260225%2Fus-east-1%2Fs3%2Faws4_request&X-Amz-Signature=fcae979aeeabd79192d9c6f39cb13955335008a2816a695c0704873942d7e0f9&hash=9b7bfafb5d3ba28552bf4b13c8cc4bdcd26cb7d06d279007d9a1f30ab68036ce&host=68042c943591013ac2b2430a89b270f6af2c76d8dfd086a07176afe7c76c2c61&pii=S2093791123000823&tid=spdf-70dbc0cc-2f16-443d-bc2c-f97980478d0c&sid=323f66de8e4980408c0be7b-7fe7e7fe55f2gxrqb&type=client&tsoh=d3d3LnNjaWVuY2VkaXJlY3QuY29t&rh=d3d3LnNjaWVuY2VkaXJlY3QuY29t&ua=0b015e065457505759&rr=9d3510914923ea76&cc=id
Publisher
1Department of Environmental Health, Korea National Open University, Seoul, Republic of Korea
2Department of Environmental Health, Graduate School of Public Health, Seoul National University, Seoul, Republic of Korea
3National Cancer Control Institute, National Cancer Center, Goyang, Republic of Korea
4Department of Industrial Safety and Health, Osan University, Osan, Republic of Korea
5Department of Occupational and Environmental Medicine, International St. Mary’s Hospital, Catholic Kwandong University, Republic of Korea 6US Army 65th Medical Brigade, Force Health Protection and Preventive Medicine Unit, USA
7Occupational Safety & Health Research Institute, KOSHA, Ulsan, Republic of Korea
8 Changwon National University, Changwon, Republic of Korea
2Department of Environmental Health, Graduate School of Public Health, Seoul National University, Seoul, Republic of Korea
3National Cancer Control Institute, National Cancer Center, Goyang, Republic of Korea
4Department of Industrial Safety and Health, Osan University, Osan, Republic of Korea
5Department of Occupational and Environmental Medicine, International St. Mary’s Hospital, Catholic Kwandong University, Republic of Korea 6US Army 65th Medical Brigade, Force Health Protection and Preventive Medicine Unit, USA
7Occupational Safety & Health Research Institute, KOSHA, Ulsan, Republic of Korea
8 Changwon National University, Changwon, Republic of Korea
Date
8 December 2023
Contributor
FAJAR BAGUS W
Format
PDF
Language
ENGLISH
Type
TEXT
Files
Citation
Dong-Uk Park 1,*, Kyung Ehi Zoh 2,3,#, Eun Kyo Jeong 4
, Dong-Hee Koh 5
, Kyong-Hui Lee 6
,
Naroo Lee 7
, Kwonchul Ha, “Assessment of Occupational Health Risks for Maintenance Work in
Fabrication Facilities: Brief Review and Recommendations,” Repository Horizon University Indonesia, accessed April 26, 2026, https://repository.horizon.ac.id/items/show/11664.
Fabrication Facilities: Brief Review and Recommendations,” Repository Horizon University Indonesia, accessed April 26, 2026, https://repository.horizon.ac.id/items/show/11664.