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Safety and Health at Work Vol. 12 Issue 3 2021
Possibility of Benzene Exposure in Workers of a Semiconductor Industry Based on the Patent Resources, 1990-2010 (Original article)
Background: This study aimed to assess the possibility of benzene exposure in workers of a Korean semiconductor manufacturing company by reviewing the issued patents.
Methods: A systematic patent search was conducted with the Google “Advanced Patent…
Methods: A systematic patent search was conducted with the Google “Advanced Patent…
Safety and Health at Work Vol. 11 Issue 4 2020
Chemical Use and Associated Health Concerns in the Semiconductor Manufacturing Industry (Original Article)
Background: Research on the status of many chemicals used in the semiconductor industry is needed. The purpose of this study was to describe the overall status of chemical use in the semiconductor industry in Korea and to examine it from a health…
Safety and Health at Work Vol. 10 Issue 1 2019
Evaluation of Hazardous Chemicals with Material Safety Data Sheet and By-products of a Photoresist Used in the Semiconductor-Manufacturing Industry (Original Article)
Background: The photolithography process in the semiconductor industry uses various chemicals with
little information on their constitution. This study aimed to identify the chemical constituents of
photoresist (PR) products and their by-products…
little information on their constitution. This study aimed to identify the chemical constituents of
photoresist (PR) products and their by-products…